Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

F. Tochikubo, T. Makabe

研究成果: Article

16 引用 (Scopus)

抜粋

A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.

元の言語English
記事番号003
ページ(範囲)1133-1137
ページ数5
ジャーナルMeasurement Science and Technology
2
発行部数12
DOI
出版物ステータスPublished - 1991 12 1

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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