Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

Engineering & Materials Science

• Electrons 60%
• Glow discharges 88%
• Optical emission spectroscopy 100%
• Ray tracing 69%

Mathematics

• Absolute value 29%
• Electron 30%
• Excitation 61%
• Lifetime 30%
• Ray Tracing 42%
• Spectroscopy 78%

Physics & Astronomy

• electron impact 29%
• excitation 29%
• glow discharges 29%
• optical emission spectroscopy 68%
• radiative lifetime 34%
• ray tracing 30%