Advantages of densely packed multi-wire transistors with planar gate structure fabricated on low-k buried insulator over planar silicon-on-insulator devices

Mizuki Ono, Ken Uchida, Tsutomu Tezuka

研究成果: Article › 査読

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Advantages of densely packed multi-wire transistors with planar gate structure fabricated on low-k buried insulator over planar silicon-on-insulator devices

フィンガープリント

Physics & Astronomy

Engineering & Materials Science