Air pressure sensor for an insect wing

Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference article査読

11 被引用数 (Scopus)

抄録

This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250μm × 200 μm × 0.3 μm. The sensitivity to air pressure was 0.29 × 10 -3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.

本文言語English
論文番号4805510
ページ(範囲)825-828
ページ数4
ジャーナルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOI
出版ステータスPublished - 2009 6 1
外部発表はい
イベント22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
継続期間: 2009 1 252009 1 29

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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