This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250μm × 200 μm × 0.3 μm. The sensitivity to air pressure was 0.29 × 10 -3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.
|ジャーナル||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|出版ステータス||Published - 2009 6 1|
|イベント||22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy|
継続期間: 2009 1 25 → 2009 1 29
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