TY - JOUR
T1 - Air pressure sensor for an insect wing
AU - Takahashi, Hidetoshi
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2009/6/1
Y1 - 2009/6/1
N2 - This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250μm × 200 μm × 0.3 μm. The sensitivity to air pressure was 0.29 × 10 -3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.
AB - This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250μm × 200 μm × 0.3 μm. The sensitivity to air pressure was 0.29 × 10 -3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.
UR - http://www.scopus.com/inward/record.url?scp=65949105073&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=65949105073&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2009.4805510
DO - 10.1109/MEMSYS.2009.4805510
M3 - Conference article
AN - SCOPUS:65949105073
SP - 825
EP - 828
JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SN - 1084-6999
M1 - 4805510
T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Y2 - 25 January 2009 through 29 January 2009
ER -