抄録
This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250μm × 200 μm × 0.3 μm. The sensitivity to air pressure was 0.29 × 10 -3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.
| 本文言語 | English |
|---|---|
| 論文番号 | 4805510 |
| ページ（範囲） | 825-828 |
| ページ数 | 4 |
| ジャーナル | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| DOI | |
| 出版ステータス | Published - 2009 6 1 |
| 外部発表 | はい |
| イベント | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy 継続期間: 2009 1 25 → 2009 1 29 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering