Airflow shear stress sensor using side-wall doped piezoresistive plate

R. Kazama, H. Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference article査読

4 被引用数 (Scopus)

抄録

This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.

本文言語English
論文番号7051056
ページ(範囲)710-713
ページ数4
ジャーナルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2015-February
February
DOI
出版ステータスPublished - 2015 2 26
外部発表はい
イベント2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
継続期間: 2015 1 182015 1 22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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