Airflow shear stress sensor using side-wall doped piezoresistive plate

R. Kazama, H. Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.

本文言語English
ホスト出版物のタイトル2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
出版社Institute of Electrical and Electronics Engineers Inc.
ページ710-713
ページ数4
February
ISBN(電子版)9781479979554
DOI
出版ステータスPublished - 2015 2 26
外部発表はい
イベント2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
継続期間: 2015 1 182015 1 22

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
番号February
2015-February
ISSN(印刷版)1084-6999

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
国/地域Portugal
CityEstoril
Period15/1/1815/1/22

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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