AlN cantilever for differential pressure sensor

Yutaka Tomimatsu; Hidetoshi Takahashi; Takeshi Kobayashi; Kiyoshi Matsumoto; Isao Shimoyama; Toshihiro Itoh; Ryutaro Maeda

doi:10.1109/ISAF.2013.6748705

AlN cantilever for differential pressure sensor

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

研究成果: Paper › 査読

2 被引用数 (Scopus)

抄録

The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

本文言語	English
ページ	336-339
ページ数	4
DOI	https://doi.org/10.1109/ISAF.2013.6748705
出版ステータス	Published - 2013 1 1
外部発表	はい
イベント	2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 - Prague 4, Czech Republic 継続期間: 2013 7 21 → 2013 7 25

Conference

Conference	2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013
国/地域	Czech Republic
City	Prague 4
Period	13/7/21 → 13/7/25

ASJC Scopus subject areas

電子工学および電気工学

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10.1109/ISAF.2013.6748705

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引用スタイル

Tomimatsu, Y., Takahashi, H., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T., & Maeda, R. (2013). AlN cantilever for differential pressure sensor. 336-339. Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic. https://doi.org/10.1109/ISAF.2013.6748705

AlN cantilever for differential pressure sensor. / Tomimatsu, Yutaka; Takahashi, Hidetoshi; Kobayashi, Takeshi; Matsumoto, Kiyoshi; Shimoyama, Isao; Itoh, Toshihiro; Maeda, Ryutaro.

2013. 336-339 Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic.

研究成果: Paper › 査読

Tomimatsu, Y, Takahashi, H, Kobayashi, T, Matsumoto, K, Shimoyama, I, Itoh, T & Maeda, R 2013, 'AlN cantilever for differential pressure sensor', Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic, 13/7/21 - 13/7/25 pp. 336-339. https://doi.org/10.1109/ISAF.2013.6748705

Tomimatsu, Yutaka ; Takahashi, Hidetoshi ; Kobayashi, Takeshi ; Matsumoto, Kiyoshi ; Shimoyama, Isao ; Itoh, Toshihiro ; Maeda, Ryutaro. / AlN cantilever for differential pressure sensor. Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic.4 p.

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AlN cantilever for differential pressure sensor

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