AlN cantilever for differential pressure sensor

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

研究成果: Paper査読

抄録

The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

本文言語English
ページ336-339
ページ数4
DOI
出版ステータスPublished - 2013 1 1
外部発表はい
イベント2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 - Prague 4, Czech Republic
継続期間: 2013 7 212013 7 25

Conference

Conference2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013
CountryCzech Republic
CityPrague 4
Period13/7/2113/7/25

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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