An analysis of substrate heating during a-Si: H Deposition using concentric cylindrical DC glow discharge

Engineering & Materials Science

• Glow discharges 100%
• Heating 48%
• Substrates 47%
• Molecules 37%
• Cathodes 28%
• Plasmas 26%
• Thermal energy 19%
• Ions 17%
• Boltzmann equation 14%
• Amorphous silicon 13%
• Charge transfer 12%
• Temperature 11%
• Thermocouples 10%
• Thermoanalysis 10%
• Anodes 9%
• Fluxes 7%

Chemical Compounds

• Glow Discharge 80%
• Cathode 36%
• Collision 33%
• Plasma 31%
• Boltzmann Equation 28%
• Energy 23%
• Molecule 23%
• Amorphous Silicon 22%
• Surface Temperature 22%
• Dissipation 18%
• Thermoanalysis 14%
• Ion 13%
• Heat 12%
• Anode 12%
• Charge Transfer 11%
• Pressure 9%
• Liquid Film 8%