抄録
This paper presents an integrated micro fluxgate magnetic sensor with planar fluxgate sensing elements and on-chip sensor interface circuits based on silicon integration technology. To simplify the integration process, we developed a noble sensing element with two-layer spiral coils and permalloy thin films at the top layer. The sensor interface circuits have been fabricated with the standard n-channel E/D (enhancement/ depletion) MOS process technology, and include the driver circuits for the periodic excitation of the core through the excitation coil and signal-processing circuits for the pick-up coil output based on second-harmonic detection. The fabricated planar sensing element has a magnetic sensitivity of about 73 V T-1 at 1 MHz excitation frequency and 150 mAp-p driver current. The magnetic sensitivity of the integrated fluxgate sensor is about 90 V T-1 at 610 kHz excitation frequency and 110 mAp-p driver current.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 121-126 |
| ページ数 | 6 |
| ジャーナル | Sensors and Actuators, A: Physical |
| 巻 | 55 |
| 号 | 2-3 |
| DOI | |
| 出版ステータス | Published - 1996 7月 31 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 器械工学
- 凝縮系物理学
- 表面、皮膜および薄膜
- 金属および合金
- 電子工学および電気工学