Analysis and compensation in specific frequency based on composite filter for nanoscale motion control

Fumito Nishi, Seiichiro Katsura

研究成果: Conference contribution

抄録

Nanoscale motion control is required for miniaturization and performance improvement of mechatronics systems. In motion control at nanometer scale, disturbances which do not affect the system at macro scale might greatly influence the control performance. The torque ripple caused by distortion of current is one of the most serious disturbance elements and should be eliminated. To address this problem, the method of the filter designing is proposed in this paper. The effect of the distortion of the current can be reduced by designing the filter in disturbance observer to have low-pass filter and band-stop filter. This paper shows the design method and the stability of force control based on the composite filter. By using high-precision acceleration control based on the proposed method, persistent oscillation can be suppressed, control accuracy can be improved. The validity of the proposal is confirmed by experiments.

本文言語English
ホスト出版物のタイトルIECON Proceedings (Industrial Electronics Conference)
出版社Institute of Electrical and Electronics Engineers Inc.
ページ2695-2700
ページ数6
ISBN(電子版)9781479940325
DOI
出版ステータスPublished - 2014 2 24

出版物シリーズ

名前IECON Proceedings (Industrial Electronics Conference)

ASJC Scopus subject areas

  • 電子工学および電気工学

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