抄録
Numerical simulations become useful for the developing RF-ICP (Radio Frequency Inductively Coupled Plasma) negative ion sources. We are developing and parallelizing a two-dimensional three velocity electromagnetic Particle-In-Cell code. The result shows rapid increase in the electron density during the density ramp-up phase. A radial electric field due to the space charge is produced with increase in the electron density and the electron transport in the radial direction is suppressed. As a result, electrons stay for a long period in the region where the inductive electric field is strong, and this leads efficient electron acceleration and a rapid increasing of the electron density.
本文言語 | English |
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論文番号 | 02B126 |
ジャーナル | Review of Scientific Instruments |
巻 | 85 |
号 | 2 |
DOI | |
出版ステータス | Published - 2014 2 |
ASJC Scopus subject areas
- Instrumentation