Analysis of rapid increase in the plasma density during the ramp-up phase in a radio frequency negative ion source by large-scale particle simulation

M. Yasumoto, M. Ohta, Y. Kawamura, A. Hatayama

研究成果: Review article査読

2 被引用数 (Scopus)

抄録

Numerical simulations become useful for the developing RF-ICP (Radio Frequency Inductively Coupled Plasma) negative ion sources. We are developing and parallelizing a two-dimensional three velocity electromagnetic Particle-In-Cell code. The result shows rapid increase in the electron density during the density ramp-up phase. A radial electric field due to the space charge is produced with increase in the electron density and the electron transport in the radial direction is suppressed. As a result, electrons stay for a long period in the region where the inductive electric field is strong, and this leads efficient electron acceleration and a rapid increasing of the electron density.

本文言語English
論文番号02B126
ジャーナルReview of Scientific Instruments
85
2
DOI
出版ステータスPublished - 2014 2

ASJC Scopus subject areas

  • Instrumentation

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