Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film

Rihachiro Nakashima, Hidetoshi Takahashi

研究成果: Conference contribution

抄録

This paper reports on the fabrication method of an angular accelerometer with integrated liquid spiral channels and laser-induced graphene (LIG) sensing element. The proposed fabrication process forms the LIG sensing element and the spiral grooves via a CO2 laser and a UV laser, respectively, on a polyimide (PI) film. The liquid-sealed spiral channels are fabricated by filling the grooves with silicone oil and applying parylene deposition. Thus, the fabrication process is quite ple. The prototype sensor was validated for its response to angular acceleration.

本文言語English
ホスト出版物のタイトル35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
出版社IEEE Computer Society
ページ747-749
ページ数3
ISBN(電子版)9781665409117
DOI
出版ステータスPublished - 2022
イベント35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
継続期間: 2022 1月 92022 1月 13

出版物シリーズ

名前IEEE Symposium on Mass Storage Systems and Technologies
2022-January
ISSN(印刷版)2160-1968

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
国/地域Japan
CityTokyo
Period22/1/922/1/13

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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