Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films

Ayako Kimura, Masahiro Kawate, Hiroyuki Hasegawa, Tetsuya Suzuki

研究成果: Article査読

111 被引用数 (Scopus)

抄録

Ti1-XAlXN and Cr1-XAlXN films were synthesized by the arc ion plating method differing in the second metal contents X and investigated on their crystal structures, lattice parameters and microstructures. X-ray diffraction patterns showed that crystal structures of both Ti1-XAl XN and Cr1-XAlXN films changed from the NaCl-type (cubic structure; c-) to wurtzite-type (hexagonal structure; h-) at Al contents X =0.6-0.7. Lattice parameters of c-Ti1-X AlXN and c-Cr1-XAlXN with Al contents X ≤0.6 uniformly decreased with respect to all lattice spacings with increasing X values. On the other hand, for h-Ti1-X AlXN and h-Cr1-XAlXN films with X ≥0.7, anisotropic lattice expansion and shrinkage were observed with the a- and c-axes. The lattice spacing expanded in the a-direction and shrank in the c-direction by adding Ti and Cr atoms with larger atomic radius into AlN structure, respectively.

本文言語English
ページ(範囲)367-370
ページ数4
ジャーナルSurface and Coatings Technology
169-170
DOI
出版ステータスPublished - 2003 6 2

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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