Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation

Jiwang Yan, Fuminori Kobayashi, Momoji Kubo, Tsunemoto Kuriyagawa

研究成果: Conference contribution

抄録

Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.

元の言語English
ホスト出版物のタイトルProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
出版者euspen
ページ372-376
ページ数5
2
ISBN(印刷物)9780956679000
出版物ステータスPublished - 2012
イベント12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden
継続期間: 2012 6 42012 6 7

Other

Other12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Sweden
Stockholm
期間12/6/412/6/7

Fingerprint

Silicon
Laser beam effects
integrity
irradiation
silicon
lasers
damage
Pulsed lasers
Chemical elements
Molecular dynamics
Laser pulses
Electron microscopes
Crystalline materials
Recovery
pulsed lasers
Lasers
electron microscopes
recovery
molecular dynamics
Processing

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering
  • Materials Science(all)

これを引用

Yan, J., Kobayashi, F., Kubo, M., & Kuriyagawa, T. (2012). Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. : Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 (巻 2, pp. 372-376). euspen.

Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. / Yan, Jiwang; Kobayashi, Fuminori; Kubo, Momoji; Kuriyagawa, Tsunemoto.

Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. 巻 2 euspen, 2012. p. 372-376.

研究成果: Conference contribution

Yan, J, Kobayashi, F, Kubo, M & Kuriyagawa, T 2012, Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. : Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. 巻. 2, euspen, pp. 372-376, 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, Stockholm, Sweden, 12/6/4.
Yan J, Kobayashi F, Kubo M, Kuriyagawa T. Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. : Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. 巻 2. euspen. 2012. p. 372-376
Yan, Jiwang ; Kobayashi, Fuminori ; Kubo, Momoji ; Kuriyagawa, Tsunemoto. / Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. 巻 2 euspen, 2012. pp. 372-376
@inproceedings{9b449d3f2f504b98befe3337e12d64f2,
title = "Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation",
abstract = "Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.",
author = "Jiwang Yan and Fuminori Kobayashi and Momoji Kubo and Tsunemoto Kuriyagawa",
year = "2012",
language = "English",
isbn = "9780956679000",
volume = "2",
pages = "372--376",
booktitle = "Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012",
publisher = "euspen",

}

TY - GEN

T1 - Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation

AU - Yan, Jiwang

AU - Kobayashi, Fuminori

AU - Kubo, Momoji

AU - Kuriyagawa, Tsunemoto

PY - 2012

Y1 - 2012

N2 - Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.

AB - Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.

UR - http://www.scopus.com/inward/record.url?scp=84911437252&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84911437252&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84911437252

SN - 9780956679000

VL - 2

SP - 372

EP - 376

BT - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012

PB - euspen

ER -