Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation

Jiwang Yan, Fuminori Kobayashi, Momoji Kubo, Tsunemoto Kuriyagawa

研究成果: Conference contribution

抄録

Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.

本文言語English
ホスト出版物のタイトルProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
編集者H. Spaan, Theresa Burke, Paul Shore
出版社euspen
ページ372-376
ページ数5
ISBN(電子版)9780956679000
出版ステータスPublished - 2012 1 1
イベント12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden
継続期間: 2012 6 42012 6 7

出版物シリーズ

名前Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
2

Other

Other12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
CountrySweden
CityStockholm
Period12/6/412/6/7

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering
  • Materials Science(all)

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