Barometric pressure change measurement

N. Minh-Dung, H. Takahashi, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

In this paper, we report a high-sensitivity barometric pressure sensor for use in automotive navigation, personal mobile systems and environmental monitoring. The sensor consisted of an open cavity and a micro piezo-resistive cantilever, which is placed at the cavity's opening. In the proposed structure, the cavity did not need to be vacuum-sealed and the air-gap between the cantilever and its surrounding walls was micrometer order size. The cantilever was used to detect the time-variant interaction between barometric pressure and the pressure inside the cavity. Evaluation experiments demonstrate that the sensor is able to measure the barometric pressure change with high sensitivity, with expected resolution of 0.1 Pa.

本文言語English
ホスト出版物のタイトル2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ページ898-901
ページ数4
DOI
出版ステータスPublished - 2011 9 1
外部発表はい
イベント2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
継続期間: 2011 6 52011 6 9

出版物シリーズ

名前2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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