TY - GEN
T1 - Barometric pressure change measurement
AU - Minh-Dung, N.
AU - Takahashi, H.
AU - Matsumoto, K.
AU - Shimoyama, I.
PY - 2011/9/1
Y1 - 2011/9/1
N2 - In this paper, we report a high-sensitivity barometric pressure sensor for use in automotive navigation, personal mobile systems and environmental monitoring. The sensor consisted of an open cavity and a micro piezo-resistive cantilever, which is placed at the cavity's opening. In the proposed structure, the cavity did not need to be vacuum-sealed and the air-gap between the cantilever and its surrounding walls was micrometer order size. The cantilever was used to detect the time-variant interaction between barometric pressure and the pressure inside the cavity. Evaluation experiments demonstrate that the sensor is able to measure the barometric pressure change with high sensitivity, with expected resolution of 0.1 Pa.
AB - In this paper, we report a high-sensitivity barometric pressure sensor for use in automotive navigation, personal mobile systems and environmental monitoring. The sensor consisted of an open cavity and a micro piezo-resistive cantilever, which is placed at the cavity's opening. In the proposed structure, the cavity did not need to be vacuum-sealed and the air-gap between the cantilever and its surrounding walls was micrometer order size. The cantilever was used to detect the time-variant interaction between barometric pressure and the pressure inside the cavity. Evaluation experiments demonstrate that the sensor is able to measure the barometric pressure change with high sensitivity, with expected resolution of 0.1 Pa.
KW - Pressure sensor
KW - air leakage
KW - barometric pressure
KW - open cavity
KW - piezo-resistive cantilever
UR - http://www.scopus.com/inward/record.url?scp=80052126294&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80052126294&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2011.5969212
DO - 10.1109/TRANSDUCERS.2011.5969212
M3 - Conference contribution
AN - SCOPUS:80052126294
SN - 9781457701573
T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
SP - 898
EP - 901
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Y2 - 5 June 2011 through 9 June 2011
ER -