Basic performance analysis of ER gel in vacuum

Y. Shida, Y. Kakinuma, T. Aoyama, H. Minami, H. Anzai

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Electro-rheological gel (ER gel) exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the electro-adhesive effect (EA effect). The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally analyze the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.

本文言語English
ホスト出版物のタイトルElectro-Rheological Fluids and Magneto-Rheological Suspensions - Proceedings of the 12th International Conference
出版社World Scientific Publishing Co. Pte Ltd
ページ81-87
ページ数7
ISBN(印刷版)9814340227, 9789814340229
DOI
出版ステータスPublished - 2011 1 1
イベント12th International Conference on Electrorheological Fluids and Magnetorheological Suspensions, ERMR 2010 - Philadelphia, PA, United States
継続期間: 2010 8 162010 8 20

出版物シリーズ

名前Electro-Rheological Fluids and Magneto-Rheological Suspensions - Proceedings of the 12th International Conference

Other

Other12th International Conference on Electrorheological Fluids and Magnetorheological Suspensions, ERMR 2010
国/地域United States
CityPhiladelphia, PA
Period10/8/1610/8/20

ASJC Scopus subject areas

  • 流体および伝熱

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