Basic performance evaluation of electrorheological gel in vacuum condition

Y. Shida, Y. Kakinuma, T. Aoyama, H. Minami, H. Anzai

研究成果: Article査読

3 被引用数 (Scopus)


ER gel exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the EA effect. The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally evaluate the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.

ジャーナルJournal of Intelligent Material Systems and Structures
出版ステータスPublished - 2011 10月

ASJC Scopus subject areas

  • 材料科学(全般)
  • 機械工学


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