抄録
ER gel exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the EA effect. The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally evaluate the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.
本文言語 | English |
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ページ(範囲) | 1699-1705 |
ページ数 | 7 |
ジャーナル | Journal of Intelligent Material Systems and Structures |
巻 | 22 |
号 | 15 |
DOI | |
出版ステータス | Published - 2011 10月 |
ASJC Scopus subject areas
- 材料科学(全般)
- 機械工学