Beam cleanup by stimulated Brillouin scattering phase conjugation for a KrF laser at high repetition rate

T. Yagi, H. Saito, T. Fujioka, K. Ohta, T. Arai, M. Obara

研究成果: Conference contribution

抄録

A stimulated Brillouin scattering (SBS) phase conjugation with a KrF amplifier is used to obtain the high-pointing stability and small beam divergence necessary for precision micromachining. The goal is to achieve a beam divergence 1.5 times the diffraction limit, 0.1 cm-1 of a bandwidth, and the high-pointing stability at a pulse rate of 1-kHz. An experimental scheme that provided preliminary results of beam cleanup by SBS phase conjugation up to 100 Hz of the pulse rate is described. The method used to analyze the spectrum distribution in the beam cross section is presented, and examples of the Fabry-Perot fringes and calculated shift (in wavenumber) mapped onto the beam cross section are show. This example indicates that the spectrum in the band-narrowed KrF laser can be nonuniform, and it can cause poor reflectance in the phase conjugation. Calculation of the energy distribution associated with the narrowband and broadband portions showed that the narrowband seed beam contained a considerable amount of the broadband component, which is mostly distributed in the outer part of the beam.

本文言語English
ホスト出版物のタイトルCONFERENCE ON LASERS AND ELECTRO-0PTICS
編集者 Anon
出版社Publ by IEEE
ページ340, 342-340, 343
ISBN(印刷版)1557520860
出版ステータスPublished - 1989 12 1
イベントSummaries of Papers Presented at the Conference on Lasers and Electro-Optics - Baltimore, MD, USA
継続期間: 1989 4 241989 4 28

出版物シリーズ

名前CONFERENCE ON LASERS AND ELECTRO-0PTICS

Other

OtherSummaries of Papers Presented at the Conference on Lasers and Electro-Optics
CityBaltimore, MD, USA
Period89/4/2489/4/28

ASJC Scopus subject areas

  • Engineering(all)

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