Biaxial angular acceleration sensor with rotational- symmetric spiral channels and MEMS piezoresistive cantilevers

Rihachiro Nakashima, Hidetoshi Takahashi

研究成果: Article査読

抄録

Angular acceleration sensors are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxial sensor units arranged orthogonally. The sensor units consist of two rotationalsymmetric spiral channels and microelectromechanical system (MEMS) piezoresistive cantilevers. The cantilever is placed to interrupt the flow at the junctions of parallelly aligned spirals in each channel. When two cantilevers are used as the resistance of the bridge circuit in the two-gauge method, the rotational-symmetric spiral channels enhance the sensitivity in the target axis, while the nontarget axis sensitivities are canceled. The fabricated device responds with approximately constant sensitivity from 1 to 15 Hz, with a value of 3.86 × 10-5/(rad/s2), which is equal to the theoretical value. The nontarget axis sensitivity is approximately 1/400 of the target axis sensitivity. In addition, we demonstrate that each unit responds according to the tilt angle when the device is tilted along the two corresponding rotational axis planes. Thus, it is concluded that the developed device realizes biaxial angular acceleration measurement with low crosstalk.

本文言語English
論文番号507
ジャーナルMicromachines
12
5
DOI
出版ステータスPublished - 2021

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

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