Cantilever with 10-fold tunable spring constant using Lorentz force

W. Ohnishi, Hidetoshi Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports a cantilever with 10-fold tunable spring constant. The spring constant can be tuned both larger and smaller using Lorentz force generated by direct current which flows through the wiring on the cantilever. We designed the cantilever so that the maximum spring constant change by Lorentz force can be the same order as initial spring constant. The change of the spring constant was evaluated from the resonant frequency shift. The experimental result shows that the resonant frequency can be controlled from 1.1 kHz to 3.8 kHz, and the ratio of the tuned spring constant to the initial value was evaluated to be from 0.22 to 2.6.

本文言語English
ホスト出版物のタイトルMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ866-868
ページ数3
ISBN(電子版)9781509019731
DOI
出版ステータスPublished - 2016 2 26
外部発表はい
イベント29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
継続期間: 2016 1 242016 1 28

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2016-February
ISSN(印刷版)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
国/地域China
CityShanghai
Period16/1/2416/1/28

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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