Cantilever with 10-fold tunable spring constant using Lorentz force

W. Ohnishi; Hidetoshi Takahashi; T. Takahata; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2016.7421767

Cantilever with 10-fold tunable spring constant using Lorentz force

W. Ohnishi, Hidetoshi Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports a cantilever with 10-fold tunable spring constant. The spring constant can be tuned both larger and smaller using Lorentz force generated by direct current which flows through the wiring on the cantilever. We designed the cantilever so that the maximum spring constant change by Lorentz force can be the same order as initial spring constant. The change of the spring constant was evaluated from the resonant frequency shift. The experimental result shows that the resonant frequency can be controlled from 1.1 kHz to 3.8 kHz, and the ratio of the tuned spring constant to the initial value was evaluated to be from 0.22 to 2.6.

本文言語	English
ホスト出版物のタイトル	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	866-868
ページ数	3
ISBN（電子版）	9781509019731
DOI	https://doi.org/10.1109/MEMSYS.2016.7421767
出版ステータス	Published - 2016 2月 26
外部発表	はい
イベント	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China 継続期間: 2016 1月 24 → 2016 1月 28

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
巻	2016-February
ISSN（印刷版）	1084-6999

Other

Other	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
国/地域	China
City	Shanghai
Period	16/1/24 → 16/1/28

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

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10.1109/MEMSYS.2016.7421767

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引用スタイル

Ohnishi, W., Takahashi, H., Takahata, T., Matsumoto, K., & Shimoyama, I. (2016). Cantilever with 10-fold tunable spring constant using Lorentz force. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 866-868). [7421767] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421767

Cantilever with 10-fold tunable spring constant using Lorentz force. / Ohnishi, W.; Takahashi, Hidetoshi; Takahata, T. その他.

MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 866-868 7421767 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

研究成果: Conference contribution

Ohnishi, W, Takahashi, H, Takahata, T, Matsumoto, K & Shimoyama, I 2016, Cantilever with 10-fold tunable spring constant using Lorentz force. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421767, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 866-868, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 16/1/24. https://doi.org/10.1109/MEMSYS.2016.7421767

Ohnishi W, Takahashi H, Takahata T, Matsumoto K, Shimoyama I. Cantilever with 10-fold tunable spring constant using Lorentz force. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 866-868. 7421767. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421767

Ohnishi, W. ; Takahashi, Hidetoshi ; Takahata, T. その他. / Cantilever with 10-fold tunable spring constant using Lorentz force. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 866-868 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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Cantilever with 10-fold tunable spring constant using Lorentz force

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