Carbon nanotube CVD-growth technology for future ULSI interconnects (invited)

研究成果: Conference contribution

抄録

The technological advancements of carbon nanotube (CNT) material technologies and the potential of metallic CNT vias for future ULSI interconnections were described. CNTs have ultra-high thermal conductivity, as high as that of diamond, and can solve the problem of heat removal in ULSIs. CNTs also offer the advantage of ballistic transport along the tube, which can be the solution to the high-resistance problem in scaled-down vias. It was found that the estimated current density of on nanotube reached about 2.0×108 A/cm2, which is two orders of magnitude higher than the current density for Cu.

元の言語English
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 2004
ページ318-319
ページ数2
出版物ステータスPublished - 2004
外部発表Yes
イベント2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
継続期間: 2004 10 262004 10 29

Other

Other2004 International Microprocesses and Nanotechnology Conference
Japan
Osaka
期間04/10/2604/10/29

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Chemical vapor deposition
Carbon nanotubes
Current density
Ballistics
Nanotubes
Diamonds
Thermal conductivity
Hot Temperature

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Awano, Y. (2004). Carbon nanotube CVD-growth technology for future ULSI interconnects (invited). : Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 318-319)

Carbon nanotube CVD-growth technology for future ULSI interconnects (invited). / Awano, Yuji.

Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 318-319.

研究成果: Conference contribution

Awano, Y 2004, Carbon nanotube CVD-growth technology for future ULSI interconnects (invited). : Digest of Papers - Microprocesses and Nanotechnology 2004. pp. 318-319, 2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, 04/10/26.
Awano Y. Carbon nanotube CVD-growth technology for future ULSI interconnects (invited). : Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 318-319
Awano, Yuji. / Carbon nanotube CVD-growth technology for future ULSI interconnects (invited). Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. pp. 318-319
@inproceedings{4c964bcfed894e2eab59097eb69b1272,
title = "Carbon nanotube CVD-growth technology for future ULSI interconnects (invited)",
abstract = "The technological advancements of carbon nanotube (CNT) material technologies and the potential of metallic CNT vias for future ULSI interconnections were described. CNTs have ultra-high thermal conductivity, as high as that of diamond, and can solve the problem of heat removal in ULSIs. CNTs also offer the advantage of ballistic transport along the tube, which can be the solution to the high-resistance problem in scaled-down vias. It was found that the estimated current density of on nanotube reached about 2.0×108 A/cm2, which is two orders of magnitude higher than the current density for Cu.",
author = "Yuji Awano",
year = "2004",
language = "English",
isbn = "4990247205",
pages = "318--319",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2004",

}

TY - GEN

T1 - Carbon nanotube CVD-growth technology for future ULSI interconnects (invited)

AU - Awano, Yuji

PY - 2004

Y1 - 2004

N2 - The technological advancements of carbon nanotube (CNT) material technologies and the potential of metallic CNT vias for future ULSI interconnections were described. CNTs have ultra-high thermal conductivity, as high as that of diamond, and can solve the problem of heat removal in ULSIs. CNTs also offer the advantage of ballistic transport along the tube, which can be the solution to the high-resistance problem in scaled-down vias. It was found that the estimated current density of on nanotube reached about 2.0×108 A/cm2, which is two orders of magnitude higher than the current density for Cu.

AB - The technological advancements of carbon nanotube (CNT) material technologies and the potential of metallic CNT vias for future ULSI interconnections were described. CNTs have ultra-high thermal conductivity, as high as that of diamond, and can solve the problem of heat removal in ULSIs. CNTs also offer the advantage of ballistic transport along the tube, which can be the solution to the high-resistance problem in scaled-down vias. It was found that the estimated current density of on nanotube reached about 2.0×108 A/cm2, which is two orders of magnitude higher than the current density for Cu.

UR - http://www.scopus.com/inward/record.url?scp=23244461052&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=23244461052&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:23244461052

SN - 4990247205

SP - 318

EP - 319

BT - Digest of Papers - Microprocesses and Nanotechnology 2004

ER -