Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano

doi:10.1117/12.580083

Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano

研究成果: Conference article › 査読

2 被引用数 (Scopus)

抄録

We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections.

本文言語	English
論文番号	07
ページ（範囲）	37-44
ページ数	8
ジャーナル	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
巻	5732
DOI	https://doi.org/10.1117/12.580083
出版ステータス	Published - 2005 7 21
外部発表	はい
イベント	Quantum Sensing and Nanophotonic Devices II - San Jose, CA, United States 継続期間: 2005 1 23 → 2005 1 27

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Biomaterials
Atomic and Molecular Physics, and Optics
Radiology Nuclear Medicine and imaging

文献へのアクセス

10.1117/12.580083

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引用スタイル

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