Carbon Nanotubes for Interconnects

Mizuhisa Nihei, Motonobu Sato, Akio Kawabata, Shintaro Sato, Yuji Awano

研究成果: Chapter

1 被引用数 (Scopus)

抄録

Carbon nanotubes (CNTs) exhibit excellent electrical properties that include a long mean free path, a high current-carrying capability and high thermal conductivity. Because of these factors, with their low electrical resistance and large electromigration tolerance, CNTs have been expected for use as aggressively scaled interconnects for next-generation LSIs. We report our trials of using CNT bundles as vertical interconnects, such as contact plugs on CMOS and vias on Cu wire.

本文言語English
ホスト出版物のタイトルAdvanced Interconnects for ULSI Technology
出版社John Wiley and Sons
ページ491-502
ページ数12
ISBN(印刷版)9780470662540
DOI
出版ステータスPublished - 2012 2 17
外部発表はい

ASJC Scopus subject areas

  • Materials Science(all)

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