Characterization of a microfluidic device fabricated using a photosensitive sheet

Takeshi Ito, Taku Kawaguchi, Hiroko Miyoshi, Kenichi Maruyama, Satoru Kaneko, Seishiro Ohya, Yuzuru Iwasaki, Osamu Niwa, Koji Suzuki

研究成果: Article査読

15 被引用数 (Scopus)

抄録

We investigated the characteristics of microfluidic devices fabricated using photosensitive sheets adhered to substrates. We evaluated them in regard to practical criteria, namely chemical resistance, pressure sealing, electrical resistance and elution of ions. No samples exhibited peeling after postbaking when we investigated the adhesion characteristics by dicing. The sheet swelled dramatically on exposure to an alkaline solution. The microfluidic devices consisting of photosensitive sheet sandwiched by two Pyrex substrates and a photosensitive sheet sandwiched by two PMMA substrates had a pressure sealing of 0.6 MPa, were capable of withstanding a pressure of 0.2 MPa for 1 h when ultrapure water was injected. The sheets had a high volume resistivity (9.7 × 1012 Ω cm) and a high surface resistivity (2.3 × 1011 Ω) after postbaking. Sodium ions were adsorbed onto the photosensitive sheet and then gradually desorbed. The total amount of sodium ion elution per unit area over 24 h was 8.3 × 10-9 mol mm -2 as measured by ion exchange chromatography. These results confirm that microfluidic devices fabricated using photosensitive sheets are suitable for use as disposable devices for certain applications.

本文言語English
論文番号003
ページ(範囲)432-438
ページ数7
ジャーナルJournal of Micromechanics and Microengineering
17
3
DOI
出版ステータスPublished - 2007 3月 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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