Characterization of miniaturized one-side-electrode-type fluid-based inclinometer

Asrulnizam Bin Abd Manaf, Kazumasa Nakamura, Yoshinori Matsumoto

研究成果: Article査読

26 被引用数 (Scopus)


In this study, electrical double-layer theory is applied to realize a one-side-electrode-type fluid-based inclinometer combined with complementary metal oxide semiconductor (CMOS) circuitry. Substrate penetration lithography was applied in the fabrication of high-aspect-ratio SU-8 container molds, and molds with heights 1.0 mm were fabricated. Polydimethylsiloxane (PDMS) was used as the container material, and electrodes were fabricated on a ceramic substrate. Considering the electrical double-layer property, low surface tension, the dielectric constant and the problem of volatilization, methanol and propylene carbonate were tested as electrolytes. A charge-balanced capacitance-voltage (C-V) conversion circuit was designed as a detection circuit for this sensor and it was fabricated using 0.35 μm CMOS technology. The sensor part and detection circuit were integrated in one ceramic packaging for realize a miniaturization of inclination sensor system. To overcome the surface tension of the PDMS surface, silicone oil was injected in the container to cover the entire inner surface so that the movement of solution in the container became smooth. The linearity of the analog output of ±60° inclination for container dimensions of Ø 4.0 mm × 1.0 mm (diameter × thickness) was less than 6%/F.S. The minimum moving angle and response time were 0.4° and 0.9 s, respectively, when propylene carbonate was used as the electrolyte. The change in temperature did not affect the output voltage of the sensor between 0 and 50 °C. The effect of vibration was demonstrated in this paper.

ジャーナルSensors and Actuators, A: Physical
出版ステータスPublished - 2008 5 28

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学


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