Chemical deposition of rodlike GaOOH and β-Ga2O3 films using simple aqueous solutions

Shinobu Fujihara, Yoshiki Shibata, Eiji Hosono

研究成果: Article査読

38 被引用数 (Scopus)


Rodlike GaOOH particles and films were successfully prepared in a large scale from a simple aqueous gallium nitrate solution. First, a hydrothermal treatment of the solution at 150°C led to the formation of GaOOH rods, and their subsequent heat-treatments at 700°C promoted transformation into β-Ga2O3 having the similar particle morphology. Second, using the same aqueous solutions, strongly c-axis-oriented GaOOH films consisting of rodlike particles could be deposited on substrates through chemical solution processes. It was found that heterogeneous nucleation of GaOOH was enhanced by coating thin metal oxide (SnO2, rutile TiO 2, anatase TiO2, and MgO) underlayers on quartz glass substrates, thereby resulting in the formation of uniform films. Transparent β-Ga2O3 films were obtained by heat-treatments at higher temperatures. Upon excitation by ultraviolet light (250 nm), the β-Ga2O3 films exhibited visible green luminescence.

ジャーナルJournal of the Electrochemical Society
出版ステータスPublished - 2005 12 2

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 再生可能エネルギー、持続可能性、環境
  • 表面、皮膜および薄膜
  • 電気化学
  • 材料化学


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