Circular pyramidal kirigami microscanner with millimeter-range low-power lens drive

研究成果: Article査読

1 被引用数 (Scopus)

抄録

This paper proposes an electrothermally-actuated circular pyramidal kirigami microscanner with a millimeter-range low-power lens drive for endoscopic biomedical applications. A variation of Japanese origami art, kirigami involves creation of out-of-plane structures by paper cutting and folding. The proposed microscanner is composed of freestanding kirigami film on which the spiral-curved thermal bimorphs are strategically placed. The kirigami microscanner is electrothermally transformed into an out-of-plane circular multistep pyramid by Joule heating. The circular pyramidal kirigami microscanner on a small footprint of 4.5 mm 4.5 mm was fabricated by microelectromechanical system processes. A large four-step pyramidal actuation was successfully demonstrated, and a large 1.1-mm lens travel range at only 128 mW was achieved.

本文言語English
ページ(範囲)17457-17467
ページ数11
ジャーナルOptics Express
28
12
DOI
出版ステータスPublished - 2020 6月 8

ASJC Scopus subject areas

  • 原子分子物理学および光学

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