CNT-FET gas sensor using a functionalized ionic liquid as gate

N. Kiga, Y. Takei, A. Inaba, H. Takahashi, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

10 被引用数 (Scopus)

抄録

We propose a gas sensor using combination of carbon nanotubes (CNTs) and ionic liquid (IL). In our research, we used IL, 1-ethyl-3-methyl imidazolium tetrafluoroborate ([EMIM][BF 4]) which specially absorbs CO 2 / NH 3, and polymer, polyethyleneimine (PEI) which absorbs CO 2. This IL or the mixture of IL and PEI dropped on the CNT-FET were applied as a CNT-FET IL-gate and a surface modification material of CNTs. When the IL absorbs specific gases, the ion types and concentrations change. We measured the change of CNT I-V property by applying a voltage to the IL-gate to attract the ions onto the CNT surface.

本文言語English
ホスト出版物のタイトル2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
ページ796-799
ページ数4
DOI
出版ステータスPublished - 2012 5 7
外部発表はい
イベント2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
継続期間: 2012 1 292012 2 2

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
国/地域France
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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