TY - JOUR
T1 - Comparison of crack resistance between ternary CrSiC and quaternary CrSiCN coatings via nanoindentation
AU - Wang, Qianzhi
AU - Wu, Zhiwei
AU - Zhou, Fei
AU - Yan, Jiwang
N1 - Funding Information:
This work has been initiated from a Japan–China joint research project and partially supported by a research grant in Keio University. This work has been also supported by National Natural Science Foundation of China (Grant no. 51375231 ), Doctoral Program of Higher Education (Grant no. 20133218110030 ), Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD), Jiangsu Innovation Program for Graduate Education (Grant no. KYLX0234 ) and the Fundamental Research Funds for the Central Universities .
Publisher Copyright:
© 2015 Elsevier B.V.
PY - 2015/8/6
Y1 - 2015/8/6
N2 - Quaternary CrSiCN and ternary CrSiC coatings with various Si concentrations were synthesized on Si(100) wafers via adjusting the flow of (CH3)3SiH (TMS) in precursor gases. The mechanical property and crack resistance of these coatings were evaluated and compared, as well as the influence of Si concentration was investigated. Compared with the CrSiC coatings, the CrSiCN coatings had higher elasticity and compressive stresses, and in turn, exhibited higher resistance to radial cracks in despite of the Si concentration. The greater thickness of CrSiCN coatings is, the better the crack resistance is. By increasing Si concentration, the compressive stress was released in both categories of coatings, but the trends of crack generation for the two categories of coatings were totally different. For the CrSiCN coatings, a reduction of compressive stress prevented parallel crack initiation around the impression edge after unloading. In contrast, as the compressive stress in the CrSiC coatings was released, radial cracks were generated at the impression corners and the length of radial crack increases with the stress release.
AB - Quaternary CrSiCN and ternary CrSiC coatings with various Si concentrations were synthesized on Si(100) wafers via adjusting the flow of (CH3)3SiH (TMS) in precursor gases. The mechanical property and crack resistance of these coatings were evaluated and compared, as well as the influence of Si concentration was investigated. Compared with the CrSiC coatings, the CrSiCN coatings had higher elasticity and compressive stresses, and in turn, exhibited higher resistance to radial cracks in despite of the Si concentration. The greater thickness of CrSiCN coatings is, the better the crack resistance is. By increasing Si concentration, the compressive stress was released in both categories of coatings, but the trends of crack generation for the two categories of coatings were totally different. For the CrSiCN coatings, a reduction of compressive stress prevented parallel crack initiation around the impression edge after unloading. In contrast, as the compressive stress in the CrSiC coatings was released, radial cracks were generated at the impression corners and the length of radial crack increases with the stress release.
KW - Crack
KW - Morphology
KW - Nanoindentation
KW - PVD coatings
KW - Residual stress
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U2 - 10.1016/j.msea.2015.07.024
DO - 10.1016/j.msea.2015.07.024
M3 - Article
AN - SCOPUS:84937027285
SN - 0921-5093
VL - 642
SP - 391
EP - 397
JO - Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing
JF - Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing
ER -