Comparison of crack resistance between ternary CrSiC and quaternary CrSiCN coatings via nanoindentation

Engineering & Materials Science

• Nanoindentation 100%
• Coatings 61%
• Cracks 55%
• Compressive stress 38%
• Unloading 9%
• Crack initiation 9%
• Elasticity 8%
• Mechanical properties 5%
• Gases 5%

Physics & Astronomy

• nanoindentation 83%
• cracks 63%
• coatings 55%
• unloading 10%
• crack initiation 10%
• high resistance 10%
• adjusting 7%
• elastic properties 6%
• trends 6%
• wafers 6%
• mechanical properties 6%
• gases 4%

Chemical Compounds

• Resistance 52%
• Coating Agent 49%
• Crack Initiation 14%
• Flow 5%
• Length 5%
• Gas 4%
• Reduction 4%