In order to reduce the offset and its temperature drift of the piezoresistive pressure sensor by the different properties of the piezoresistors and the residual stress, a double Wheatstone-bridge pressure sensor was studied. Because a compensation bridge was arranged near by the pressure sensitive bridge, which have the similar offset components, reduction of the offset and its temperature drift was realized by the subtraction of the output of the two bridges. By this compensation method, the offset and its temperature drift were reduced more than 95%, respectively. The sensitivity of the fabricated pressure sensor was 11.7 mV/V kgf cm-2 for 0.9 kgf cm-2 full-scale pressure range.
|出版ステータス||Published - 1995|
|イベント||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden|
継続期間: 1995 6 25 → 1995 6 29
|Other||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)|
|Period||95/6/25 → 95/6/29|
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