Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

T. Kitajima, M. Izawa, R. Hashido, N. Nakano, T. Makabe

研究成果: Article査読

14 被引用数 (Scopus)

抄録

Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.

本文言語English
ページ(範囲)758-760
ページ数3
ジャーナルApplied Physics Letters
69
6
DOI
出版ステータスPublished - 1996 8月 5

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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