Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform

A. Ishibashi, H. Kaiju, Y. Yamagata, N. Kawaguchi

研究成果: Article査読

9 被引用数 (Scopus)

抄録

Analysis of achieving a clean environment in a connected box-units system is performed. By feedback of outlet air into the inlet of the box-unit, the steady-state airborne-particle-count in the system becomes independent of the ambient particle count and depends little on the particle-arrest efficiency of the filter. It is demonstrated that ISO 3 (209D Class 1) cleanliness in an inexpensive compact manner with the versatile extensive connected box-units system can be realised, no matter how dusty the ambient.

本文言語English
ページ(範囲)735-736
ページ数2
ジャーナルElectronics Letters
41
13
DOI
出版ステータスPublished - 2005 6 23
外部発表はい

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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