Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform

A. Ishibashi; H. Kaiju; Y. Yamagata; N. Kawaguchi

doi:10.1049/el:20051053

Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform

A. Ishibashi, H. Kaiju, Y. Yamagata, N. Kawaguchi

研究成果: Article › 査読

9 被引用数 (Scopus)

抄録

Analysis of achieving a clean environment in a connected box-units system is performed. By feedback of outlet air into the inlet of the box-unit, the steady-state airborne-particle-count in the system becomes independent of the ambient particle count and depends little on the particle-arrest efficiency of the filter. It is demonstrated that ISO 3 (209D Class 1) cleanliness in an inexpensive compact manner with the versatile extensive connected box-units system can be realised, no matter how dusty the ambient.

本文言語	English
ページ（範囲）	735-736
ページ数	2
ジャーナル	Electronics Letters
巻	41
号	13
DOI	https://doi.org/10.1049/el:20051053
出版ステータス	Published - 2005 6 23
外部発表	はい

ASJC Scopus subject areas

Electrical and Electronic Engineering

文献へのアクセス

10.1049/el:20051053

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引用スタイル

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