Control of a 6 DOF Microvibration Testing Device Using Adaptive Digital Filter

Yoshimasa Nishiyama, Masaki Takahashi, Yasutaka Tagawa, Masashi Yasuda

研究成果: Article査読

抄録

Microvibration control technology has been rapidly becoming important in a number of fields including superfine technoloby in semiconductor manufacturing and bio-technology in gene analysis. In this paper, an active 6 DOF microvibration testing device using air actuators is studied from the view point of control system design. In the previous study, a combination of dual model matching controller and off-line feedforward gave good reference following performance. However, an interference problem to other axes has not been solved. In this study, in order to solve this problem, an adaptive digital filter called Filtered-X is applied to the control system. The effectiveness of the proposed control system is verified through reference following experiments, when a test model is equipped on the table.

本文言語English
ページ(範囲)641-646
ページ数6
ジャーナルNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
70
691
DOI
出版ステータスPublished - 2004
外部発表はい

ASJC Scopus subject areas

  • 材料力学
  • 機械工学
  • 産業および生産工学

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