Coolant effects on tool wear in machining single-crystal silicon with diamond tools

Tsutomu Ohta, Jiwang Yan, Sunao Kodera, Shuuma Yajima, Naoyuki Horikawa, Youichi Takahashi, Tsunemoto Kuriyagawa

研究成果: Article査読

11 被引用数 (Scopus)

抄録

The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.

本文言語English
ページ(範囲)144-150
ページ数7
ジャーナルKey Engineering Materials
389-390
出版ステータスPublished - 2009
外部発表はい

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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