Cryogenic micromachining of PDMS for microfluidic chips

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

PDMS (polydimethylsiloxane) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. In addition, there are restrictions to fabricated shapes in their techniques. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, the micro milling has not yet been applied to the soft polymer materials because of their high compliant properties at room temperature. In this study, the cryogenic micro milling process is proposed for fabrication of the micro channels on PDMS and its performance is analyzed experimentally. The results of the cutting tests show that the 3D shaped micro groove can be processed precisely and rapidly on the PDMS by the proposed cryogenic machining method.

本文言語English
ホスト出版物のタイトルProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
編集者Hendrik Van Brussel, E. Brinksmeier, H. Spaan, T. Burke
出版社euspen
ページ20-23
ページ数4
ISBN(電子版)9780955308253
出版ステータスPublished - 2008 1 1
イベント10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 - Zurich, Switzerland
継続期間: 2008 5 182008 5 22

出版物シリーズ

名前Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
2

Other

Other10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
国/地域Switzerland
CityZurich
Period08/5/1808/5/22

ASJC Scopus subject areas

  • 器械工学
  • 機械工学
  • 材料科学(全般)
  • 環境工学
  • 産業および生産工学

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