Crystallographic effects in micro/nanomachining of single-crystal calcium fluoride

Jiwang Yan, Katsuo Syoji, Jun'ichi Tamaki

研究成果: Article › 査読

本文言語	English
ページ（範囲）	46-51
ページ数	6
ジャーナル	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
巻	22
号	1
DOI	https://doi.org/10.1116/1.1633770
出版ステータス	Published - 2004 1月 1
外部発表	はい

ASJC Scopus subject areas

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