Dense uniform arrays of site-controlled quantum dots grown in inverted pyramids

S. Watanabe, E. Pelucchi, B. Dwir, M. H. Baier, K. Leifer, E. Kapon

研究成果: Article査読

50 被引用数 (Scopus)

抄録

The growth and optical characteristics of dense, pyramidal single semiconductor quantum dot (QD) heterostructures with pitch between 500-300 nm were studied. It was found that the dense arrays were grown by organometallic chemical vapor deposition on (111)B QD substrates containing dense inverted pyramid recess patterns which were prepared by electron beam lithography and wet chemical etching. Low-temperature cathodoluminescence showed the high uniformity of dense QD arrays accross micrometer-scale areas. It was observed that the low-temperature microphotoluminescence spectra of the dense arrays showed distinct luminescence from the QDs linewidth of 1-3 MeV.

本文言語English
ページ(範囲)2907-2909
ページ数3
ジャーナルApplied Physics Letters
84
15
DOI
出版ステータスPublished - 2004 4月 12
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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