Design of a piezoresistive triaxial force sensor probe using the sidewall doping method

Tetsuo Kan, Hidetoshi Takahashi, Nguyen Binh-Khiem, Yuichiro Aoyama, Yusuke Takei, Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Article

15 引用 (Scopus)

抜粋

In this study, we propose a triaxial force measurement sensor probe with piezoresistors fabricated via sidewall doping using rapid thermal diffusion. The device was developed as a tool for measuring micronewton-level forces as vector quantities. The device consists of a 15 μm thick cantilever, two sensing beams and four wiring beams. The length and width of the cantilever are 1240 μm and 140 μm, respectively, with a beam span of 1200 μm and a width of 10-15 μm. The piezoresistors are formed at the root of the cantilever and the sidewalls of the two sensing beams. The sensor spring constants for each axis were measured at kx = 1.5 N m-1, ky= 3.5 N m-1 and kz = 0.64 N m-1. We confirmed that our device was capable of measuring triaxial forces with a minimum detectable force at the submicronewton level.

元の言語English
記事番号035027
ジャーナルJournal of Micromechanics and Microengineering
23
発行部数3
DOI
出版物ステータスPublished - 2013 3 1
外部発表Yes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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