Design of a piezoresistive triaxial force sensor probe using the sidewall doping method

Tetsuo Kan, Hidetoshi Takahashi, Nguyen Binh-Khiem, Yuichiro Aoyama, Yusuke Takei, Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Article査読

19 被引用数 (Scopus)

抄録

In this study, we propose a triaxial force measurement sensor probe with piezoresistors fabricated via sidewall doping using rapid thermal diffusion. The device was developed as a tool for measuring micronewton-level forces as vector quantities. The device consists of a 15 μm thick cantilever, two sensing beams and four wiring beams. The length and width of the cantilever are 1240 μm and 140 μm, respectively, with a beam span of 1200 μm and a width of 10-15 μm. The piezoresistors are formed at the root of the cantilever and the sidewalls of the two sensing beams. The sensor spring constants for each axis were measured at kx = 1.5 N m-1, ky= 3.5 N m-1 and kz = 0.64 N m-1. We confirmed that our device was capable of measuring triaxial forces with a minimum detectable force at the submicronewton level.

本文言語English
論文番号035027
ジャーナルJournal of Micromechanics and Microengineering
23
3
DOI
出版ステータスPublished - 2013 3
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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