Design of double nozzle type powder jet device optimized for PJD

Toshihiko Shibuya, Mohammad Saeed Sepasy, Koichi Mizutani, Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

研究成果: Article

4 引用 (Scopus)

抜粋

Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [I]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.

元の言語English
ページ(範囲)398-403
ページ数6
ジャーナルKey Engineering Materials
389-390
出版物ステータスPublished - 2009 1 1
外部発表Yes

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • これを引用

    Shibuya, T., Sepasy, M. S., Mizutani, K., Yoshihara, N., Yan, J., & Kuriyagawa, T. (2009). Design of double nozzle type powder jet device optimized for PJD. Key Engineering Materials, 389-390, 398-403.