Detection principle and verification of non-contact displacement meter with Pico-meter resolution

Hideaki Tamiya, Kayoko Taniguchi, Kazuo Yamazaki, Hideki Aoyama

研究成果: Paper査読

抄録

Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.

本文言語English
DOI
出版ステータスPublished - 2017 11 13
イベント9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan
継続期間: 2017 11 132017 11 17

Other

Other9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
国/地域Japan
CityHiroshima City
Period17/11/1317/11/17

ASJC Scopus subject areas

  • 産業および生産工学

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