Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.
|出版ステータス||Published - 2017 11 13|
|イベント||9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan|
継続期間: 2017 11 13 → 2017 11 17
|Other||9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017|
|Period||17/11/13 → 17/11/17|
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