Determination of the composition of strained tetragonal epilayers

P. Fons, D. J. Bottomley, D. J. Tweet, S. Niki, A. Yamada

研究成果: Article査読

3 被引用数 (Scopus)

抄録

Elasticity theory is applied to calculate the total strain present in a tetragonal symmetry epilayer due to heteroepitaxial misfit. By relating pseudobinary alloy composition to the lattice constants of the epilayer, it is shown that the composition of a pseudobinary epilayer can be determined from measurement of the strained epilayer lattice constants. This is accomplished by expressing the misfit strain in terms of the composition and the individual lattice constants of the component of the epilayer and using Vegard's rule. As a result, determination of the composition of two chalcopyrite symmetry epilayers from x-ray diffraction measurements is demonstrated. The approach presented here is general and can be applied to any substrate-epilayer combination in the elastic limit.

本文言語English
ページ(範囲)761-763
ページ数3
ジャーナルApplied Physics Letters
69
6
DOI
出版ステータスPublished - 1996 8月 5
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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