Development and evaluation of capacitance detection ASIC for three-axis common electrode type capacitive accelerometer

Yoshinori Matsumoto, Shoji Kawahito, Makoto Ishida

研究成果: Article査読

1 被引用数 (Scopus)

抄録

A capacitance detection CMOS ASIC has been developed for three-axis common electrode type capacitive accelerometers. The ASIC contains an analog output switched capacitor circuit and a digital output 2nd order delta-sigma modulator. The circuits were driven by three or six phase clocks for three-axis detection. The characteristics of the circuits were evaluated by a variable capacitor and a three-axis capacitive accelerometer. A novel compensation method was proposed to reduce the sensitivity dependence on Z-axis acceleration. The three-axis output voltages of the switched capacitor circuits were proportional to three-axis accelerations. The offset and sensitivity of the 2nd order delta-sigma modulator can be calibrated by outer voltages. The sensitivities of 1.5V/G and 20kHz/G were obtained respectively when the circuits were combined with a commercial available three-axis capacitive accelerometer.

本文言語English
ページ(範囲)135-141
ページ数7
ジャーナルieej transactions on sensors and micromachines
121
3
DOI
出版ステータスPublished - 2001

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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