Development and realization of a Fl-switching valve in extended-nano space utilizing glass deformation properties at the nanometer scale

Yuriy Pihosh, Yutaka Kazoe, Hitomi Takahashi, Kazuma Mawatari, Kyojiro Morikawa, Takehiko Kitamori

研究成果: Conference contribution

抄録

We report on realization of a fL-switching valve based on an extended-nano channel (ENC) utilizing glass deformation properties. A tiny deformation of glass by the precise actuator control system can lead to an open/closed state of ENC because of its smallness, even if we use a tough glass material. Here we are demonstrating a new concept of a hemispherical valve chamber, its fabrication method, and the valve proof of principle.

本文言語English
ホスト出版物のタイトル21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
出版社Chemical and Biological Microsystems Society
ページ535-536
ページ数2
ISBN(電子版)9780692941836
出版ステータスPublished - 2020
外部発表はい
イベント21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 - Savannah, United States
継続期間: 2017 10月 222017 10月 26

出版物シリーズ

名前21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017

Conference

Conference21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
国/地域United States
CitySavannah
Period17/10/2217/10/26

ASJC Scopus subject areas

  • 化学工学(その他)
  • バイオエンジニアリング

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