Development of a three-dimensional encoder for highly accurate positioning

Hideaki Tamiya, Yoshiyukt Mitera, Kayoko Taniguchi, Hideki Aoyama, Kazuo Yamazakf

研究成果: Article査読

3 被引用数 (Scopus)


To satisfy the miniaturization requirements of semiconductor manufacturing and metrology, orthogonal Z-axis stage controllability of equipment using highly accurate position detectors are necessary in addition to fundamental XY-axes stage movement control. The Z-axis position detector must have high accuracy, high resolution, and high stability against environmental changes in temperature, humidity, and air pressure. In this paper, a two-dimensional encoder based on a grating interferometer detection method is presented, A prototype XZ-axes encoder was built and evaluated for long-term stability against variations in environmental conditions as well as short-range linear accuracy. The evaluation results show that it is feasible to integrate the encoder with a highly accurate two-dimensional (XZ or YZ) stage control with sub-nanometer resolution. The performance of the encoder as a Z-axis position detector satisfies the demands of industry. By applying the methods developed to the third axis, it can be possible to upgrade the position detection system to three dimensions.

ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
出版ステータスPublished - 2019 1月 1

ASJC Scopus subject areas

  • 機械工学


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