We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Materials Science(all)
- Condensed Matter Physics