Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution

Daisuke Sakuma, Tomoya Shinozaki, Yusuke Nago, Ryosuke Ishiguro, Satoshi Kashiwaya, Shintaro Nomura, Kimitoshi Kono, Hideaki Takayanagi

研究成果: Article査読

2 被引用数 (Scopus)

抄録

We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.

本文言語English
ページ(範囲)300-306
ページ数7
ジャーナルJournal of Low Temperature Physics
183
3-4
DOI
出版ステータスPublished - 2016 5 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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