Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution

Daisuke Sakuma; Tomoya Shinozaki; Yusuke Nago; Ryosuke Ishiguro; Satoshi Kashiwaya; Shintaro Nomura; Kimitoshi Kono; Hideaki Takayanagi

doi:10.1007/s10909-016-1556-2

Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution

Daisuke Sakuma, Tomoya Shinozaki, Yusuke Nago, Ryosuke Ishiguro, Satoshi Kashiwaya, Shintaro Nomura, Kimitoshi Kono, Hideaki Takayanagi

物理学科

研究成果: Article › 査読

2 被引用数 (Scopus)

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We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.

本文言語	English
ページ（範囲）	300-306
ページ数	7
ジャーナル	Journal of Low Temperature Physics
巻	183
号	3-4
DOI	https://doi.org/10.1007/s10909-016-1556-2
出版ステータス	Published - 2016 5月 1

ASJC Scopus subject areas

原子分子物理学および光学
材料科学（全般）
凝縮系物理学

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10.1007/s10909-016-1556-2

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AU - Sakuma, Daisuke

AU - Shinozaki, Tomoya

AU - Nago, Yusuke

AU - Ishiguro, Ryosuke

AU - Kashiwaya, Satoshi

AU - Nomura, Shintaro

AU - Kono, Kimitoshi

AU - Takayanagi, Hideaki

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Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution

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