Development of electrolyte-based capacitive level sensor

Hideki Morinaga, Yoshinori Matsumoto

研究成果: Article査読

抄録

In this study, electrolyte-based level sensor has been fabricated on printed circuit board and evaluated with charge balanced C-V converter fabricated by 0.357mu;m CMOS process. Sector pattern sensor electrodes were fabricated and polydimethylsiloxane was used as package material. Propylene carbonate was injected in the bumpy surface sensor cavity of 10mm diameter and 2mm height, output voltage was changed with the inclination angle without the effect of vibration.

本文言語English
ページ(範囲)469-470
ページ数2
ジャーナルieej transactions on sensors and micromachines
129
12
DOI
出版ステータスPublished - 2009

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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