Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

Takuya Nakagawa, Yoshihiro Taguchi, Yuji Nagasaka

研究成果: Conference contribution

抄録

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

本文言語English
ホスト出版物のタイトルInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
出版社IEEE Computer Society
ISBN(印刷版)9781509063727
DOI
出版ステータスPublished - 2018 9 4
イベント23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
継続期間: 2018 7 292018 8 2

出版物シリーズ

名前International Conference on Optical MEMS and Nanophotonics
2018-July
ISSN(印刷版)2160-5033
ISSN(電子版)2160-5041

Other

Other23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
国/地域Switzerland
CityLausanne
Period18/7/2918/8/2

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料

フィンガープリント

「Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル