Development of fixture element for vacuum transportation of silicon wafer using electro-rheological gel

Masayuki Tanaka, Yasuhiro Kakinuma, Tojiro Aoyama, Hidenobu Anzai, Takafumi Kawaguchi

研究成果: Paper査読

抄録

Electro-rheological gel (ERG) is a functional material whose friction characteristic varies according to the intensity of an applied electric field. In this study, ERG is applied to the fixture element for a silicon wafer. Silicon wafers are used for semiconductor manufacturing, a process carried out in a vacuum. The purpose of this study is to clarify the basic characteristic of ERG in a vacuum. To investigate these characteristics, several tests were carried out using silicon wafers. In addition, the optimal shape of one-sided electrodes applying the electric field effectively was designed by means of a static electric field analysis.

本文言語English
出版ステータスPublished - 2007 12 1
イベント4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan
継続期間: 2007 11 72007 11 9

Other

Other4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
国/地域Japan
CityFukuoka
Period07/11/707/11/9

ASJC Scopus subject areas

  • 産業および生産工学

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