Development of high-flux ion source for size-selected nanocluster ions based on high-power impulse magnetron sputtering

Hironori Tsunoyama, Chuhang Zhang, Hiroki Akatsuka, Hiroki Sekiya, Tomomi Nagase, Atsushi Nakajima

研究成果: Article査読

20 被引用数 (Scopus)

抄録

In this study, we have developed a highly intensive ion source of size-selected nanoclusters based on a high-power impulse magnetron sputtering method. The maximum intensity of the size-selected silver nanocluster anions exceeded that of standard ion sources by more than ten times. The high intensity in the present method was achieved by the high throughput of the ion optics and the high ionization fraction. Fine tuning of the nanocluster size distributions was also demonstrated.

本文言語English
ページ(範囲)857-859
ページ数3
ジャーナルChemistry Letters
42
8
DOI
出版ステータスPublished - 2013

ASJC Scopus subject areas

  • Chemistry(all)

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