Development of novel Micro Optical Diffusion Sensor using comb-driven Micro Fresnel Mirror

Y. Matoba, Y. Taguchi, Y. Nagasaka

研究成果: Conference contribution

抄録

We have developed a novel Micro Optical Diffusion Sensor (MODS) with a newly proposed comb-driven Micro Fresnel Mirror (MFM) scanner for the sample which structure is changed drastically. To measure the dynamic change of the conformation of the sample, the fringe pattern should be changed in order to maintain the appropriate excitation condition for the accurate measurement. In this study, the pre-tilted mirror is rotated by the vertical comb-driven actuators to change the mirror angle resulting the change of the fringe spacing. In this paper, we confirmed the validity of the proposed mirror scanner and fabricated the prototype device.

本文言語English
ホスト出版物のタイトル17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
出版社Chemical and Biological Microsystems Society
ページ266-268
ページ数3
ISBN(印刷版)9781632666246
出版ステータスPublished - 2013
イベント17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013 - Freiburg, Germany
継続期間: 2013 10 272013 10 31

出版物シリーズ

名前17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
1

Other

Other17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
国/地域Germany
CityFreiburg
Period13/10/2713/10/31

ASJC Scopus subject areas

  • バイオエンジニアリング

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